Products  

Aston™

Atonarp’s Aston: Real time process control for semiconductor applications and the ultimate solution for CVD, atom layer deposition, etch, atomic layer etch and chamber matching in high volume manufacturing environment. Aston represents a major evolution in metrology for semiconductor processes.  Built from the ground up as a robust molecular sensor for the semiconductor industry Aston is resistant to corrosive gases and resistant to deposition particles. Learn More About Aston™  

LyoSentinel™

The Atonarp LyoSentinel is the industry’s first ever quantitative real time miniaturized molecular Sensor and Silicone oil protection module for lyophilization (Lyo) process gas detection.   LyoSentinel operates in high pressure environments without the need for external pumps. Its customizable proprietary software puts precision molecular analysis for Lyo applications at your fingertips.   Learn More About Lyosentinel™  

AMS-1000™

Atonarp’s AMS 1000 the industry’s first ever quantitative real time miniaturized molecular sensor. With a rugged Faraday Cup and calibration against the Capacitance Diaphragm Gauge (CDG), the AMS-1000 operates in high pressure environments without the need for external pumps. Its customizable proprietary software puts precision molecular analysis for Lyophilization, industrial process control and select semiconductor applications at your fingertips.   Learn More About AMS-1000™