Protecting the Environment from Harmful Emissions

Semiconductor and thin-film solar processes use and create a variety of process gases and particulate material by-products, which must be disposed of in a controlled manner.

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This disposal process is known as ‘abatement’, and has multiple challenges. Monitoring exhaust gases from the abatement system to ensure environmental compliance requires high-sensitivity, real-time, in-situ metrology with PPM level accuracy. Further, optimizing abatement requires that waste process gases be measured for the concentration of pollutants entering the abatement system.

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Many abatement systems are run 'open-loop', resulting in high levels of natural gas and nitrogen consumption. Typically, no record is kept of proof of abatement.

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Using Atonarp's Aston Plasma mass spectrometer enables in-situ, optimized control of the abatement burn process, and creates a data log for compliance. Aston Plasma is uniquely capable of withstanding harsh conditions, and can provide sensitivity down to PPB levels.

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Learn more about Aston and download our Application Brief below for more details on how Aston supports efficient abatement monitoring and exhaust gas environmental compliance.