The semiconductor and thin-film solar cell manufacturing processes use and generate a variety of process gases and particulate byproducts that must be managed and disposed of.

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This disposal process is known as "abatement" and presents multiple challenges. Monitoring the emissions from the abatement system to ensure environmental compliance requires highly sensitive, real-time, in-situ measurements with PPM-level accuracy. In addition, to optimize abatement, the concentration of contaminants entering the abatement system must be measured in the waste treatment gas.

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Many abatement units are operated on an "open loop," resulting in high consumption of natural gas and nitrogen. Generally, no records are kept to prove abatement.

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The Aston Plasma mass spectrometer from Atnerup allows for optimal on-the-fly control of the flue gas combustion process and data logging for compliance.The Aston Plasma can withstand harsh conditions and provide sensitivity down to PPB levels, making it a Aston Plasma is a unique instrument that can withstand harsh conditions and provide sensitivity up to PPB levels.

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For more information on Aston and an overview of applications that support efficient emissions monitoring and emissions environmental compliance, please download