While "money" has always been extremely important in semiconductor manufacturing, "sustainability" is of renewed importance. How can we achieve these two goals: cost reduction and reduction of emissions and waste?

It is a simple and powerful approach, "from control on the ‍-time axis to control on the ‍-event axis.

‍There is a fundamental inefficiency in time-based process management: in most cases, the process ends well before the allotted time, resulting in unnecessary inefficiency and over-cleaning. Instead, by moving to event-based process management, the process is stopped when a specific event or condition (in the case of cleaning, this is called endpoint detection), e.g., a specific gas concentration, is reached. This requires a continuously monitored on-site measurement tool such as Aston from Atonarp.

‍Find out more here.