(Head Office: Minato-ku, Tokyo; Representative Director: Sreedhar Murthy Prakash) is pleased to announce that our proposal "Real-time mass spectrometer for semiconductor process control automation" has been selected for the PCA phase (Practical Application R&D (late stage)) of the "Deep Tech Start-up Support Project" by the New Energy and Industrial Technology Development Organization (NEDO). (NEDO) has selected our proposal, "Real-time Mass Spectrometry Sensor for Automated Semiconductor Manufacturing Process Control," for the PCA phase of its "Deep Tech Start-up Support Project.

NEDO News Release
18 New Startups in the Deep Tech Field Selected
https://www.nedo.go.jp/news/press/AA5_101873.html

Background and Objectives of this Project
For advanced semiconductor manufacturing processes at the 2nm node and beyond, real-time monitoring and automatic control of gas reactions in the process chamber are indispensable. However, existing technologies have not been effective due to issues with separability and quantitativity.
To solve this problem, we are developing a compact, high-performance real-time mass spectrometry sensor. With the support of the DTSU project, we will strengthen our collaboration with major semiconductor equipment manufacturers and accelerate the evaluation of our Aston Integrated embedded module and the development of AI-based data analysis software. Through these efforts, we aim to contribute to the international competitiveness of Japanese semiconductor equipment manufacturers.

Sreedhar Murthy Prakash, Representative Director, comments
We are very honored that our technology and business strategy have been recognized by NEDO and selected for the DTSU project. Through this grant project, we are confident that we will be able to further promote the development of our core technology, the mass spectrometry platform, and contribute to solving the major challenges facing the semiconductor industry. We look forward to working closely with our partners to provide solutions that will enable the world's first manufacturing process recipe automation."

At Atonalp's mission is to make people's lives safer and richer through the rapid and accurate analysis of substances at the molecular level. The company develops highly sensitive, real-time, compact mass spectrometry platforms and provides innovative molecular sensing and analysis solutions for a variety of industries, including semiconductor manufacturing and life science research.

For inquiries regarding this matter, please contact: Finance Department, Atonalp Corporation Telephone: +81-3-6435-6234
E-mail address : marketing@atonarp.com